Both part number you referr to are patr of the thru hull assembly, and a worn out carbon seal can allow air in, but then usually will leak water in when sittind idle. The pump seal I was referring to would be between the pump and pump support on the outside of hull.
My pump is made of bronze and it's pretty dinged up with 1/4 nicks and missing pieces and does not cavitates. I would think wearing to impeller clearance and air intrusion would cause the most cavitation.
A little history here would help. Has it always cavitated, started after sucking up debris or rocks, slowly gotten worse, etc.?